Etch characteristics of KOH, TMAH and dual doped TMAH …
KOH (potassium hydroxide) is a non-toxic, economical and commonly used alkali metal hydroxide silicon etchant which requires simple etch setup and provides high silicon etch rate, high degree of anisotropy, moderate Si/SiO 2 etch rate ratio and low etched surface roughness [1], [2]. But KOH damages exposed aluminum metal lines very quickly and ...
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